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3D-Micromac AG international > Portfolio > High End Laser Tools > Laser calorimeter

Laser calorimeter

In the past years applications using Excimer laser in DUV (193nm) and VUV (157nm) area became more and more popular for future-oriented technologies like semi-conductive lithography, medicine and machining of material. For that reason demands on the optical components regarding the long time laser power rating, energy density and long time stability changed dramatically.

The use of fluoride as well as oxide components for laser radiation in the DUV and VUV area depends very much on the optical characteristics which are described by the loss mechanisms and such markedly define the quality and life time.Using laser calorimetry it is possible to make reliable and significant definitions of the absorptions both of the substrate and the coating. Moreover declarations regarding the quality of the used components could be made. With this method it is possible to reduce costs in the service area and to plan the maintenance more carefully. 

We offer
  • Definition of the absorption rate for substrate and layers for laser radiation with wave length 193nm
  • Quality proof of charges and single components
  • Customer specific development and assembly of the absorption measurement workplace
Advantages of the method
  • Standardised measurement method according to EN ISO 11551
  • Absolute calibration of the measurement instrument
  • High repeatability of the measurement results
  • Demolition-free working measurement method
Features and options
  • Measurements at 0° and 45° components
  • The system can be adapted into other wavelength
  • The measurement assembly is vacuum proof
  • Measurements under nitrogen atmosphere