DPSS Laser Station

Long service life, reliability, easy handling and quality constitute criteria playing a role when choosing either an individual workstation or an entire production chain. Therefore, diode pumped solid-state-laser systems are suited best to serve under rigorous conditions present in industrial use. In workstations by 3D-Micromac, those long-term tested and robust laser sources become versatile tools for the precise and rapid machining of metal, semiconductors, ceramics and plastics - at a very reasonable cost-performance ratio.

The control of the workstation will be done by an IPC and the control software microMMI with the following features:
  • Multilingual software based on English
  • Full worldwide remote access via network
  • Customized log file to store all commands, processes and laser parameter
  • Separate modes for operators, supervisors and service
  • Programming in Visual Basic Script or via data import
  • Interfaces GDS II, STL, DXF
  • Addressing of up to 32 NC axes
  • Intuitive graphical operator interface with preview
  • Integrated vision system

Laser source

  • DPSS laser
  • Wavelengths 1064 nm, 532 nm (SHG), 355 nm (THG), 266 nm (FHG)
  • Repetition rate 1 Hz - 100 kHz
  • Beam profile TEM00
  • Energy 100 μJ - 15 mJ
  • Repetition rate 0.5 - 20 W
  • Pulse width 10 - 500 ns

System description (Example configuration)
  • Traverse path (XY) 200 mm x 200 mm
  • Positioning accuracy ± 1 μm
  • Repeat accuracy ± 0.5 μm
  • Maximum velocity 2 m/s
  • Pitch/yaw ± 8 arcsec
  • Z-axis 100 mm
  • Vacuum chuck
  • Mechanical alignment
  • Scanner with diverse fields of work and resolutions
Options
  • Semi-automated or fully automated alignment with camera system
  • Automated work piece handling
  • Vacuum chuck
  • Mounts for 300 mm wafer
  • Purpose-build mounts for masks
  • Customer-specific work piece mounts
  • Fully air-conditioned processing chamber
  • Mini environment up to ISO class 4
  • Beam analyser featuring microPROFILER software
Housing/Base frame
  • Rugged base frame made from stainless steel
  • Housing for laser class 1

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