Excimer Laser Station

Large-area machining of materials accompanied by high productivity is a matter of course with many machining technologies. Cost-effective excimer-laser workstations make this effective mode of operation available in the realm of lasers. Employing mask projection, complex structures can be – similar to slide projection - demagnified imaged onto the material. Using wavelengths in the ultraviolet range, sub-micron feature sizes can be generated - independent on whether plastics, ceramics, glasses, composites or biological tissues are to become machined.

The control of the workstation will be done by an IPC and the control software microMMI with the following features:
  • Multilingual software based on English
  • Full worldwide remote access via network
  • Customized log file to store all commands, processes and laser parameter
  • Separate modes for operators, supervisors and service
  • Programming in Visual Basic Script or via data import
  • Interfaces GDS II, STL, DXF
  • Addressing of up to 32 NC axes
  • Intuitive graphical operator interface with preview
  • Image recognition system
  • Integrated energy monitor
Laser source
  • Excimer laser
  • Wavelengths 193 nm (ArF), 248 nm (KrF), 308 nm (XeCl)
  • Repetition rate 10 Hz - 4 kHz
  • Energy 1 mJ - 1200 mJ
  • Repetition rate 0.2 W – 310 W
  • Pulse width 10 ns – 35 ns
System description (Example configuration)
  • Traverse path (XY) 200mm x 200 mm
  • Positioning accuracy ± 1 μm
  • Repeat accuracy ± 0.5 μm
  • Maximum velocity 2 m/s
  • Pitch/yaw ± 8 arc sec
  • Z axis 150 mm
  • Vacuum chuck
  • Mechanical alignment
  • Optical path rinseable
  • Observation of field of work with a CCD camera
Options
  • Scanner with diverse fields of work and resolutions
  • Semi-automated or fully automated alignment with camera system
  • Automated work piece handling
  • Work piece mounts on customers demand
  • Fully air-conditioned processing chamber
  • Mini environment up to ISO class 4
  • Beam analyser featuring microPROFILER software
 Housing/Base frame
  • Rugged base frame made from stainless steel with granite body
  • Housing for laser class 1 
 

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