Fluor Laser System EX-157

When finest structures shall be generated at highest precision, demands made on the laser system are as large as claims asserted by the user. In F2-laser systems by 3D-Micromac both demands become reality. Key features of such systems include sub-micron structuring, virtually stress-free machining, and excellent suitability for optical materials.

The control of the workstation will be done by an IPC and the control software microMMI with the following features:
  • Multilingual software based on English
  • Full worldwide remote access via network
  • Customized log file to store all commands, processes and laser parameter
  • Separate modes for operators, supervisors and service
  • Programming in Visual Basic Script or via data import
  • Interfaces GDS II, STL, DXF
  • Addressing of up to 32 NC axes
  • Image recognition system
  • Intuitive graphical operator interface with preview

Laser source

  • F2 laser
  • Wavelengths 157 nm
  • Repetition rate 50 Hz - 2 kHz
  • Energy 10 mJ - 50 mJ
  • Power max. 2.5 W
  • Pulse width ~ 20 ns

Housing / Base frame

  • Rugged base frame made from stainless steel with granite body
  • Housing for laser class 1

Options

  • Automated work piece handling
  • Customer-specific work piece mounts
  • Fully air-conditioned processing chamber
  • Mini environment up to ISO class 4

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