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Femtosecond Laser Station
Precision and quality are both most crucial in high end machining of micromechanical products. The materials being used and demands to be matched (e.g. structuring on the sub micrometer scale or thermally stress-free machining) require a purpose-build laser source.
The Femtosecond workstation by 3D-Micromac AG is ideally suited for complex tasks due to its highly special technical characteristics. Some of the features include minimal bore diameters of several 100 nanometers, the avoidance of heat affected zones, debris free and crack free machining, the absence of layer stack delamination and the capability to machine virtually every material.
The Femtosecond workstation by 3D-Micromac AG is ideally suited for complex tasks due to its highly special technical characteristics. Some of the features include minimal bore diameters of several 100 nanometers, the avoidance of heat affected zones, debris free and crack free machining, the absence of layer stack delamination and the capability to machine virtually every material.
The control of the workstation will be done by an IPC and the control software microMMI with the following features:
- Multilingual software based on English
- Full worldwide remote access via network
- Customized log file to store all commands, processes and laser parameter
- Separate modes for operators, supervisors and service
- Programming in Visual Basic Script or via data import
- Interfaces GDS II, STL, DXF
- Addressing of up to 32 NC axes
- Intuitive graphical operator interface with preview
Laser
- Femtosecond laser
- Wavelength 775 nm / 800 nm (optional SHG/THG)
- Repetition rate 1 - 6 kHz
- Beam Profile TEM00
- Energy max. 1 mJ
- Average power 1 W
- Pulse width 50 fs - 150 fs
- Automatic workpiece handling
- Vakuum chuck
- Mount for 300 mm wafer
- Customer specific workpiece mounts
- Fully air conditioned processing chamber
- Mini environment up to ISO-Class 4
- Beam analyser featuring microPROFILER software