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microSTRUCT
The new cost effective excimer laser workstation microSTRUCT by 3D-Micromac boosts your laser application to high productivity.
Complex structures can be demagnified and imaged onto the object by mask projection and optics.
Using wavelengths in the ultraviolet range, sub-micron feature sizes can be generated - no matter whether plastics, ceramics, glasses, composites or biological tissues are to be machined.
Complex structures can be demagnified and imaged onto the object by mask projection and optics.
Using wavelengths in the ultraviolet range, sub-micron feature sizes can be generated - no matter whether plastics, ceramics, glasses, composites or biological tissues are to be machined.
Applications
- Tools for micro surgery
- Automotive
- Circuit boards
- Mold making
- Hard metal tools
- Balancing of MEMS
- Telecommunication
The control of the workstation will be done by an IPC and the control software microMMI with the following features:
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Multilingual software based on English
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Full worldwide remote access via network
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Customized log file to store all commands, processes and laser parameter
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Separate modes for operators, supervisors and service
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Programming in Visual Basic Script or via data import
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Interfaces GDS II, STL, DXF
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Addressing of up to 32 NC axes
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Intuitive graphical operator interface with preview
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Image recognition system
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Integrated energy monitor
Lasersource
- 193 nm (ArF) 248 nm (KrF) 308 nm (XeCl)
- Repetition rate 10 Hz to 4 kHz
- Beam profile TEM00
- Energy 1 mJ - 1,200 mJ
- Average power 0.5 to 20 W
- Pulse width 10 to 500 ns
Options
- Scanner with diverse fields of work and resolutions
- Semi-automated or fully automated alignment with camera system
- Automated workpiece handling
- Workpiece mounts on customer demand
- Fully air-conditioned processing chamber
- Mini environment up to ISO class 4
- Beam analyser featuring microPROFILER software