microSTRUCTTM

The new cost effective excimer laser workstation microSTRUCTTM by 3D-Micromac boosts your laser application to high productivity.

Complex structures can be demagnified and imaged onto the object by mask projection and optics.
Using wavelengths in the ultraviolet range, sub-micron feature sizes can be generated - no matter whether plastics, ceramics, glasses, composites or biological tis­sues are to be machined.


Applications

  • Tools for micro surgery
  • Automotive
  • Circuit boards
  • Mold making
  • Hard metal tools
  • Balancing of MEMS
  • Telecommunication
The control of the workstation will be done by an IPC and the control software microMMI with the following features:
  • Multilingual software based on English
  • Full worldwide remote access via network
  • Customized log file to store all commands, processes and laser parameter
  • Separate modes for operators, supervisors and service
  • Programming in Visual Basic Script or via data import
  • Interfaces GDS II, STL, DXF
  • Addressing of up to 32 NC axes
  • Intuitive graphical operator interface with preview
  • Image recognition system
  • Integrated energy monitor
Lasersource
  • 193 nm (ArF) 248 nm (KrF) 308 nm (XeCl)
  • Repetition rate 10 Hz to 4 kHz
  • Beam profile TEM00
  • Energy 1 mJ - 1,200 mJ
  • Average power 0.5 to 20 W
  • Pulse width 10 to 500 ns

Options

  • Scanner with diverse fields of work and resolutions
  • Semi-automated or fully automated alignment with camera system
  • Automated workpiece handling
  • Workpiece mounts on customer demand
  • Fully air-conditioned processing chamber
  • Mini environment up to ISO class 4
  • Beam analyser featuring microPROFILERTM software

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