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microSTRUCT OLEDTM
During the manufacturing process of an OLED the different thin film layers needs to be structured. Up to now mechanical or wet chemical technologies were used. A new and innovative solution for structuring these thin films is selective laser structuring.
3D-Micromac AG has developed and successful introduced a state of the art machining concept for this laser structuring process into the market. Based on the microSTRUCTTM workstations a laser system was developed in the mayor field for selective structuring application of anode layers. Hereby the nearly transparent semiconductor tin-doped indium oxide (ITO) is used as anode material. The integration of an ultra short pulsed laser in microSTRUCTTM guarantees a gentle structuring of anode without material damage at substrate level. Special highlight is the processing of variable and scalable substrate sizes. It is realized by an innovative software controlled machining concept achieving a structuring speed of 1.5 meters per second or higher, depending on the selected laser source and the surface of the material.
In addition further layers of OLED can be machined with the same laser system. For instance there is a possibility to repair short circuits and remove other defects in the layer system of the OLED.
Furthermore the laser system can be used for engraving of the glass substrate. Marking can be done at the surface of the substrate as well as an engraving in the substrate. The nearly athermal laser machining allows a micro marking of glass without micro cracks in the substrate.A special feature of the laser workstation is an automatic handling system for reliable transportation of the OLED glass panels within the manufacturing process. An inspection system of the machined substrates – equipped with an automatic handling – can also be added.
3D-Micromac AG has developed and successful introduced a state of the art machining concept for this laser structuring process into the market. Based on the microSTRUCTTM workstations a laser system was developed in the mayor field for selective structuring application of anode layers. Hereby the nearly transparent semiconductor tin-doped indium oxide (ITO) is used as anode material. The integration of an ultra short pulsed laser in microSTRUCTTM guarantees a gentle structuring of anode without material damage at substrate level. Special highlight is the processing of variable and scalable substrate sizes. It is realized by an innovative software controlled machining concept achieving a structuring speed of 1.5 meters per second or higher, depending on the selected laser source and the surface of the material.
In addition further layers of OLED can be machined with the same laser system. For instance there is a possibility to repair short circuits and remove other defects in the layer system of the OLED.
Furthermore the laser system can be used for engraving of the glass substrate. Marking can be done at the surface of the substrate as well as an engraving in the substrate. The nearly athermal laser machining allows a micro marking of glass without micro cracks in the substrate.A special feature of the laser workstation is an automatic handling system for reliable transportation of the OLED glass panels within the manufacturing process. An inspection system of the machined substrates – equipped with an automatic handling – can also be added.
System description (sample configuration):
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Max. Travel:
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X-axis: 600 mm
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Y-axis: 400 mm
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Positioning accuracy:
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X-,Y-axis: ±1 μm
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Z-axis: 10 μm / 50 mm
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Repeatability:
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X-,Y-,Z-axis: ±1 μm
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Guide Laser
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Power regulation in beampath and at the workpiece level possible
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Image recognition system for detection of the location and alignment of workpiece
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2-,4- or 6-point detection
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Fully automatic adjustment of the workpiece
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Implementation of measurement tasks
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Free programmable CNC control system
Choice of Laser source (example):
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Type: picosecond laser
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Wave length: 355 nm
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Mean power: > 3,5 W @ 100kHz
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Repetition frequency: 0-2 MHz
Options (extract):
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2nd beam path and scanner
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Automatic z-measurement
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Active exhaust system
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Fully automatic handling system for loading and unloading of workpieces and possibility of integration